ABSTRACT A 1-3 piezocomposite transducer with front face dimensions of 2 × 2 mm has been micromachined using a copper vapor laser. The device consists of PZT5A piezoceramic pillars with a 65-μm pitch suspended in a low viscosity thermosetting polymer. The kerf width is 13 μm, and the transducer thickness is 170 μm, making the device suitable for ultrasonic reception at frequencies close to 10 MHz.
© 2001, by The Institute of Electrical and Electronics Engineers, Inc. All rights reserved.