Analysis of SAW Propagation in Gratings on ZnO/Diamond Substrates

Hiroyuki Kitabayashi and Peter M. Smith

ABSTRACT The space harmonic method is used to analyze surface acoustic wave (SAW) propagation under an infinite periodic metal grating on ZnO/diamond composite layered substrates. Dispersion properties for shorted and open gratings are derived as a function of the thickness of the grating electrodes. From these dispersion relations, the coupling of modes (COM) parameters are derived. Energy profiles inside ZnO/diamond show that the energies contained in each of the ZnO and diamond layers are of the same order when the thickness of the ZnO layer is P/π (P = grating period) and that the energy is contained within two wavelengths below the ZnO/diamond interface.

© 2001, by The Institute of Electrical and Electronics Engineers, Inc. All rights reserved.

Back To Table of Contents