ABSTRACT Thin composite films consisting of 12 vol% of nanosized lanthanum and calcium-modified lead titanate (PCLT) powder embedded in a vinylidene fluoride-trifluoroethylene copolymer [P(VDF-TrFE)] matrix were deposited on silicon (Si) substrates to form pyroelectric sensors with three different configurations. The influences of a thermal buffer layer and back etching of the silicon substrate on the current and voltage responsivities of the sensors were investigated theoretically and experimentally. The specific detectivity of the sensors was also calculated from the measured voltage responsivity and noise.
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