Fabien Josse1 and Richard W. Cernosek2
1Microsensor Research Lab., Dept. of
Electrical and Computer Engineering
Marquette
University, Milwaukee, WI
phone:
414-288-6789, fax:414-288-5579, email:
2Micro-Analytical Systems Dept., Sandia
National Laboratories,
PO Box
5800, MS 0892, Albuquerque, NM 87185-0892
phone:
505-845-8818, email:
Resonant
Piezoelectric Devices as Physical and
Biochemical Sensors
Presented at
the 2002 IEEE Int'l Frequency Control Symposium Tutorials
June 1, 2002, New
Orleans, LA, USA