ABSTRACT Quantitative characterization of the surface acoustic field radiated forward, backward, and in orthogonal directions by the grooved transducer, implemented onto a glass substrate, is accomplished by a scanning laser acoustic microscope (SLAM) operating at 31 MHz. The surface acoustic wave (SAW) amplitude is measured as a function of the number of grooves and the position of the bulk acoustic wave (BAW) transducer. The number of the operating grooves efficiently contributing to the SAW response is estimated. Remarkable reflection of the SAW beam between two identical gratings is observed.
1997 IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 44:1232-1238
© 1997 by The Institute of Electrical and Electronics Engineers, Inc. All rights reserved.