Propagation of QSH (Quasi Shear Horizontal) Acoustic Waves inPiezoelectric Plates

Boris D. Zaitsev, Shrinivas G. Joshi, and Iren E. Kuznetsova

ABSTRACTThe characteristics of QSH (quasi shear horizontal) acoustic wavespropagating in thin plates of Y-cut, X-propagation lithium niobate areinvestigated theoretically and experimentally. The fractional velocitychange (Δ v/v) produced by electrical shorting of the surface iscalculated as a function of the normalized plate thickness h/λ (h =plate thickness, λ = acoustic wavelength). It wasfound that values of Δ v/v as high as 0.18 could be obtained.Experimental measurements show good agreement with theory. The properties ofQSH waves propagating in the presence of a perfectly conducting electrodeseparated from the piezoelectric plate by a small air gap have been studiedtheoretically and experimentally. It was found that by varying the height ofthe gap, the phase shift through a 3.2-MHz QSH wave delay line can be variedby more than 230°. We have also theoretically investigated the influenceof a thin layer of arbitrary conductivity on the velocity and attenuation ofthe QSH wave. Calculations show that the variations in these parameters canbe as high as 18% and 5 dB per wavelength for a change in layer surfaceconductance from 10-7 to 10-5 S. Results obtained in this paperconfirm the attractive properties of QSH waves for a variety of sensing andsignal processing applications.

1999 IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control Vol. 46, pp. 1298-1302, 1999

© 1999, by The Institute of Electrical and Electronics Engineers, Inc. All rights reserved.

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