ABSTRACT An a priori theoretical model for electrostatic airborne ultrasonic transducers has been developed. The historical development of transducer modeling is briefly reviewed. This paper applies the plate-on-air-spring model to establish a mathematical formulation for the transducer behavior in terms of the characterized impedance parameters. It is clarified that such an electrostatic transducer is a capacitive-type device and obeys the reciprocity principle in the same way as a piezoelectric device. The accurate prediction of multiple resonant frequencies and transmitting responses for a typical V-grooved backplate transducer serve to substantiate the theoretical model.
1999 IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control Vol. 46, pp. 1120-1127, 1999
© 1999, by The Institute of Electrical and Electronics Engineers, Inc. All rights reserved.