ABSTRACT The performance of an ultra-precision three dimensional micropositioner using the built-in multilayer piezoelectric actuators and sensors is presented. The compact design utilizes the monolithic mechanism to achieve the translation in the X- and Y-axes and rotation in the thetaZ axis with high stiffness and high damping. Hysteresis, nonlinearity, and drift of piezoelectric effects are improved by incorporating the sensors in a feedback control. Experiments demonstrate that the micropositioner is capable of a 10 nm resolution over the travel range of 17.8 mu m in the X- and Y-axes and a 0.15 mu rad resolution over the range of 585 mu rad in the thetaZ axis. The crossaxis interferences are within 1.14% of the full range. The results agree well with the predictions by the theoretical models.
1999 IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control Vol. 46, pp. 906-912, 1999
© 1999, by The Institute of Electrical and Electronics Engineers, Inc. All rights reserved.