Abstract In this paper, the concept of electrical effective permittivity function is used to calculate the eigenfrequencies and the particle displacements of piezoelectric acoustic plate modes (APM). These results allowed us to determine the mass sensitivities of the first order vibration modes using a first order perturbation theory. Theoretical results are discussed and compared to those of a variational method and isotropic two-layer composite analysis in the case of a shear horizontal APM sensor on a singly rotated cut quartz substrate. Experimental measurements by a copper electrodeposition are carried out and show that the perturbation method leads to a better understanding of the APM behavior.
1998 IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 45:1266-1272
© 1998, by The Institute of Electrical and Electronics Engineers, Inc. All rights reserved.