Inductively Coupled Surface Acoustic Wave Device for Sensor Application

Klaus Beck, Matthias Wohlfahrt, Angelika R\"ugemer, Sebastian Reiss, Manfred von Schickfus, and Siegfried Hunklinger

Abstract We present a new type of surface acoustic wave device for sensor applications where the need for bonding wires is eliminated. Instead the device is coupled inductively to the RF circuitry. The impedance of such devices and the necessary matching have been investigated both theoretically and experimentally. The devices have repeatedly been operated at temperatures up to 400°C and have shown a good temperature resistance. In order to test the suitability of the new concept for sensor applications, several devices with an operating frequency of 363 MHz were coated with copper phthalocyanine for the detection of NO2. From these measurements we derive a detection limit of these devices below 1 ppb for NO2.

1998 IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 45:1140-1144

© 1998, by The Institute of Electrical and Electronics Engineers, Inc. All rights reserved.

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