Abstract In developing small micromachined components, it is difficult and costly to rely only on experiments. Nevertheless, a detailed understanding of their functioning, also on a system level, is essential if their numerous device possibilities are to be used to their fullest extent.
Development efforts can be focused on the device if performance predictions can be made with available computer software. This paper addresses the use of available finite element analysis (FEA) programs. A comparison of simulation and analytic results shows that FEA can be used to accurately predict properties such as static and harmonic response, frequency-dependent impedance, and piezo-induced changes in resonance frequencies. A limitation is the need for CPU-power, especially when determining high overtones. Also, piezoelectric materials with a finite resistivity are more complicated to handle.
1998 IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 45:815-823
© 1998, by The Institute of Electrical and Electronics Engineers, Inc. All rights reserved.