Abstract We discuss effects on the propagation of surface acoustic waves (SAW) due to heavy mass loading on Y-cut lithium niobate and lithium tantalate substrates. An abrupt reduction in the leaky-SAW (LSAW) attenuation is observed in the measured admittance of a long resonator test structure on 64\dg-YX-cut lithium niobate for aluminum electrodes of thickness h lambda 0 beyond 9-10%. This experimental fact is explained theoretically as the slowing down of the leaky wave below the velocity of the slow shear surface-skimming bulk wave (SSBW), such that energy dissipation into bulk-wave emission becomes inhibited. An infinite transducer structure is modeled using the periodic Green's function and the boundary-element method (BEM); the computed theoretical properties well explain for the experimental findings. The model is further employed to quantify the leaky surface-wave attenuation characteristics as functions of the crystal-cut angle and the thickness of the electrodes. The resonance and antiresonance frequencies and the corresponding Q values are investigated to facilitate the selection of crystal cuts and electrode thicknesses. The transformation of the leaky SAW into a SAW-type nonleaky wave is also predicted to occur for gold electrodes, with considerably thinner finger structures.
1998 IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 45:439-449
© 1998, by The Institute of Electrical and Electronics Engineers, Inc. All rights reserved.