ABSTRACT A method to achieve deep and crystal cut-independent structuring of arbitrary lateral geometry in single crystalline quartz is demonstrated. It is based on local etching of the latent track-induced anisotropy resulting from heavy ion bombardment, and is close to independent of crystallographic orientation. Previous results are briefly reviewed and a more systematic and thorough study is presented. Miniature tuning fork structures of various sizes and directions have been realized, and the suitability for frequency control device production is discussed.
1997 IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 44:829-838
© 1997 by The Institute of Electrical and Electronics Engineers, Inc. All rights reserved.