Fabrication and Optical Properties of Pb(Mg1/3Nb2/3)O3-PbTiO3 Thin Films on Si Substrates Using the PLD Method

Kazuo Shinozaki, Shogo Hayashi, Naoki Wakiya, Takanori Kiguchi, Junzo Tanaka, Nobuo Ishizawa, Keisuke Sato, Masao Kondo, and Kazuaki Kurihara

ABSTRACT Epitaxial 0.67Pb(Mg1/3Nb2/3)O3-0.33PbTiO3 (PMN-PT) thin films with electro-optic effects were fabricated on (La0.5Sr0.5)CoO3(LSCO)/CeO2/YSZ-buffered Si(001) substrates using double-pulse excitation pulsed laser deposition (PLD) method with a mask placed between the target and the substrate. Epitaxial growth of PMN-PT thin films was undertaken using the two-step growth method of PMN-PT film. The PMN-PT seed layer was deposited at 500°C on the LSCO/CeO2/YSZ/Si, which temperature was the same as that used for LSCO deposition. The PMN-PT thin films were deposited on the PMN-PT seed layer at 600°C, which enables growth of high-crystallinity PMN-PT films with smooth surfaces. We obtained optimum fabrication conditions of PMN-PT film with micrometer-order thickness. Resultant films showed high crystallinity with full width at half maximum (FWHM) = 0.73 deg and 1.6 μm thickness. Electro-optic properties and the refractive index value were measured at 633 nm wavelength using the prism coupling method. The obtained refractive index was 2.59. The electro-optic coefficients r13 and r33 were determined by applying the electrical field between a semitransparent, thin top electrode of Pt and a bottom LSCO electrode. The electro-optic coefficient was r13 = 17 pm/V at transverse electric field (TE) mode and r33 = 55 pm/V at transverse magnetic field (TM) mode.

Digital Object Identifier 10.1109/TUFFC.2008.749

© 2008, by The Institute of Electrical and Electronics Engineers, Inc. All rights reserved.

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