ABSTRACT Dependence of electrical properties---dielectric, ferroelectric, and piezoelectric properties---on film thickness was studied for lead-zirconate-titanate (PZT) thick films directly deposited onto stainless-steel (SUS) substrates in actuator devices by using a carbon dioxide (CO2), laser-assisted aerosol deposition technique. Optical spectroscopic analysis data and laser irradiation experiments revealed that absorption at a given wavelength by the film increased with increasing film thickness. Dielectric constant ε, remanent polarization value Pr, and coercive field strength Ec of PZT films directly deposited onto a SUS-based piezoelectric actuator substrate annealed by CO2 laser irradiation at 850°C improved with increasing film thickness, and for films thicker than 25 μm, ε > 800, Pr > 40 μC/cm2, and Ec < 45 kV/cm. In contrast, the displacement of the SUS-based actuator with the laser-annealed PZT thick film decreased with increasing film thickness.
Digital Object Identifier 10.1109/TUFFC.2008.747
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