ABSTRACT Metal-based, optical scanning devices with a large mirror size of 1 mm2 and a wide scanning angle of over 90° were fabricated. A high optical scanning angle (90°) was achieved at a resonance frequency of 7.33 kHz and a driving voltage of 80 V (peak-to-peak) in ambient air without vacuum packaging. We compared the performance of metal-based, optical scanners driven by PZT bulk ceramic and aerosol-deposited PZT thick films over the temperature range from -20°C to 80°C in an environmental chamber.
Digital Object Identifier 10.1109/TUFFC.2008.736
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