ABSTRACT We analyze temperature-induced frequency shift in a thickness mode bulk acoustic wave resonator with a layer of another material for temperature compensation. The perturbation integral by Tiersten is used to calculate frequency shifts in the resonator under a temperature change. It is shown that, with a proper design of the compensation layer, temperature sensitivity of the resonator can be reduced or made zero.
Digital Object Identifier 10.1109/TUFFC.2007.466
© 2007, by The Institute of Electrical and Electronics Engineers, Inc. All rights reserved.