ABSTRACT This paper is aimed at demonstrating how the wavenumber domain analysis of two-dimensional (2-D) images captured by phase-sensitive laser probe systems is applied in the characterization of RF SAW devices. Effectiveness is demonstrated through the selective characterization of spurious resonance modes and scattered, nonguided modes appearing in SAW resonators.
Digital Object Identifier 10.1109/TUFFC.2007.353
© 2007, by The Institute of Electrical and Electronics Engineers, Inc. All rights reserved.