ABSTRACT The performance of capacitive micromachined ultrasonic transducers (cMUTs) was investigated at low pressures in various gases such as air, carbon dioxide, and helium. The aim was to replicate the pressure conditions likely to meet on the surface of other planets such as Mars, where ultrasonic wind velocity measurements might be possible. It is demonstrated that cMUTs are capable of operating at low pressures, and the response to pressures below terrestrial atmospheric values is observed experimentally and compared to theoretical predictions. The center frequency of operation and sensitivity are both observed to be affected by changing pressures.
Digital Object Identifier 10.1109/TUFFC.2007.352
© 2007, by The Institute of Electrical and Electronics Engineers, Inc. All rights reserved.