Electromechanical Coupling Coefficient k₁₅ of Polycrystalline ZnO Films with the c-Axes Lie in the Substrate Plane

ABSTRACT The (1120) textured polycrystalline ZnO films with a high shear mode electromechanical coupling coefficient k₁₅ are obtained by sputter deposition. An over-moded resonator, a layered structure of metal electrode film/(1120) textured ZnO piezoelectric film/metal electrode film/silica glass substrate was used to characterize k₁₅ by a resonant spectrum method. The (1120) textured ZnO piezoelectric films with excellent crystallite c-axis alignment showed an electromechanical coupling coefficient k₁₅ of 0.24. This value was 92% of k₁₅ value in single-crystal (k₁₅ = 0.26).

Digital Object Identifier 10.1109/TUFFC.2007.303

© 2007, by The Institute of Electrical and Electronics Engineers, Inc. All rights reserved.

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