The Frequency-Dependent Directivity of a Planar Fabry-Perot Polymer Film Ultrasound Sensor

Benjamin T. Cox and Paul C. Beard

ABSTRACT A model of the frequency-dependent directivity of a planar, optically-addressed, Fabry-Perot (FP), polymer film ultrasound sensor is described and validated against experimental directivity measurements made over a frequency range of 1 to 15 MHz and angles from normal incidence to 80°. The model may be used, for example, as a predictive tool to improve sensor design, or to provide a noise-free response function that could be deconvolved from sound-field measurements in order to improve accuracy in high-frequency metrology and imaging applications. The specific question of whether effective element sizes as small as the optical-diffraction limit can be achieved was investigated. For a polymer film sensor with a FP cavity of thickness d, the minimum effective element radius was found to be about 0.9d, and that an illumination spot radius of less than d/4 is required to achieve it.

Digital Object Identifier 10.1109/TUFFC.2007.253

© 2007, by The Institute of Electrical and Electronics Engineers, Inc. All rights reserved.

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