ABSTRACT The design of the capacitive motors that are based on the electrostatic rolling of the thin metallic film on the ferroelectric surface is studied. It is shown that this method of energy conversion allows one to move the main stage of electromechanical energy conversion into the nanometer range when using the materials with high dielectric permeability (more than 500). The analysis of the distribution of the forces and field in the nanometer gap of the electrostatic micromotors is carried out. An experimental investigation of these micromotors is performed.
Digital Object Identifier 10.1109/TUFFC.2006.176
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