Ultramultiple Roundtrips of Surface Acoustic Wave on Sphere Realizing Innovation of Gas Sensors

Kazushi Yamanaka, Satoru Ishikawa, Noritaka Nakaso, Nobuo Takeda, Dong Youn Sim, Tsuyoshi Mihara, Akio Mizukami, Ichitaro Satoh, Shingo Akao, and Yusuke Tsukahara

ABSTRACT A thin beam of wave usually diverges due to diffraction, which is a limitation of any device using such waves. However, a surface acoustic wave (SAW) on a sphere with an appropriate aperture does not diverge but is naturally collimated, realizing ultramultiple roundtrips along an equator of the sphere. This effect is caused by the balance between diffraction and focusing on a spherical surface, and it enables realization of high-performance ball SAW sensors. The advantage of ball SAW is most fully appreciated when applied to a very thin sensitive film for which the multiple-roundtrip enhances the sensitivity, but the attenuation loss is not very large. It is exemplified in a hydrogen gas sensor that realizes a wide sensing range of 10 ppm to 100% for the first time, and realizes relatively fast response time of 20 s without heating the sensitive film.

© 2006, by The Institute of Electrical and Electronics Engineers, Inc. All rights reserved.

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