ABSTRACT The resistance change of ruthenium based metal-insulator-metal (MIM) thick film resistors with hydrostatic pressure exhibits excellent linearity, no hysteresis, a small temperature dependency, and an order of magnitude greater sensitivity than the longitudinal mode. The effect of long-term 106 hydrostatic pressure cycles (0 to ∼ 21 MPa) at 135°C on response linearity, sensitivity (span), and the resistance at zero pressure Ro (offset) have been established for a commercial MIM composition. No change in linearity, sensitivity, and offset was observed up to 104 cycles. After 106 cycles the offset and sensitivity changed by less than 1% and 0.5%, respectively. Other parameters remained unchanged. The results are analyzed in terms of conduction models of this system.
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