Single-Crystal Relaxor Ferroelectric Piezoactuators with Interdigitated Electrodes

Miguel Levy, Raghav Vanga, Kee S. Moon, Heung K. Park, and Yong K. Hong

ABSTRACT We report on the fabrication and performance of (1-x) Pb(Zn1/3Nb2/3)O3-xPbTiO3 (PZN-PT) single-crystal relaxor piezoactuators with interdigitated electrodes patterned on a single surface. An electric field gradient across the sample thickness induces a differential contraction between opposite faces, and it is responsible for the actuation. The samples are poled by energizing the electrodes at 100°C and cooling in a field. Calculations of the piezoelectric response based on a periodically modulated dipolar field yield good agreement with experiment. Discrepancies with the model are ascribed to multidomain formation in the ferroelectric sample as a result of field reversals in the applied electric field along the sample length.

© 2004, by The Institute of Electrical and Electronics Engineers, Inc. All rights reserved.

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