ABSTRACT The c-axis-oriented aluminum nitride (AlN) films were deposited on z-cut lithium niobate (LiNbO3) substrates by reactive RF magnetron sputtering. The crystalline orientation of the AlN film determined by x-ray diffraction (XRD) was found to be dependent on the deposition conditions such as substrate temperature, N2 concentration, and sputtering pressure. Highly c-axis-oriented AlN films to fabricate the AlN/LiNbO3-based surface acoustic wave (SAW) devices were obtained under a sputtering pressure of 3.5 mTorr, N2 concentration of 60%, RF power of 165 W, and substrate temperature of 400°C. A dense pebble-like surface texture of c-axis-oriented AlN film was obtained by scanning electron microscopy (SEM). The phase velocity and the electromechanical coupling coefficient (K2) of SAW were measured to be about 4200 m/s and 1.5%, respectively. The temperature coefficient of frequency (TCF) of SAW was calculated to be about -66 ppm/°C.
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