Lamé-Mode Miniaturized Quartz Temperature Sensors

Hisashi Kanie and Hirofumi Kawashima

ABSTRACT Lamé-mode is very useful for realization of a miniaturized quartz crystal resonator because its resonant frequency principally depends only on the contour dimensions. Because the heat capacitance for the miniaturized quartz crystal resonator is small and the frequency response versus temperature is very rapid, the quartz crystal resonator is useful for application in temperature sensors. In addition, because a Lamé-mode quartz crystal resonator has zero temperature coefficients, designated LQ1 cut and LQ2 cut, and, particularly, the resonator for LQ1 cut has a comparatively large value of the second-order temperature coefficient β, a Lamé-mode quartz crystal resonator can be obtained with the large first-order temperature coefficient α when β=0. In this paper, when cut angles φ=45° and θ=45°, α has a value of 44.6 x 10-6 °C in the calculation and 39.9 x 10-6 °C in the experiments with β ≈ 0; when φ=51.5° and $θ=45°, α=68.1 x 10-6} °C in the calculation and 62.0 x 10-6 °C in the experiments with a value of β larger than that of φ=45° and θ=45°. For both cut angles, the calculated frequency change vs. temperature is found to be sufficiently large and slightly larger than the measured one.

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