ABSTRACT This paper presents a new piezoelectric micromotor design, in which uniformly electroded piezoelectric ring bonded to a metal ring is used as the stator. Four inward arms at the inner circumference of the metal ring transfer radial displacements into tangential displacements. The rotor ends in a truncated cone shape and touches the tips of the arms. A rotation takes place by exciting coupled modes of the stator element, such as a radial mode and a second bending mode of the~arms. The behavior of the free stator was analyzed using the ATILA finite element software. Torque vs. speed relationship was measured from the transient speed change with a motor load. A starting torque of 17 μNm was obtained at 20 Vrms. The main features of this motor are low cost and easy assembly because of a simple structure and small number of components.
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