Single Element High Frequency (>50 MHz) PZT Sol Gel Composite Ultrasound Transducers

Marc Lukacs, Michael Sayer, and Stuart Foster

A sol gel composite process has been used to produce lead zirconate titanate coatings in the thickness range of 3 to 100 µm on aluminum substrates. The complex permittivity (ε33S), elastic stiffness (c33D), and the piezoelectric constant (h33) of the coating and the complex elastic stiffness (cssD) of the substrate have been determined using impedance measurements and a commercially available software program [Piezoelectric Resonance Analysis Program PRAP 2.0, TASI Technical Software, Kingston, Ontario, Canada]. The complex components of the material parameters account for the losses within the film and the substrate. Sol gel composite films on aluminum have a dielectric constant of 220 with an imaginary component of 1% and an electromechanical coupling coefficient of up to 0.24 with an imaginary component of 3%. These films are applied to the fabrication of high frequency transducers suitable for ultrasound biomicroscopy (UBM). By combining the sol gel composite material with existing transducer fabrication techniques, single-element focusing transducers have been produced that operate in the frequency range of 70 to 160 MHz. Devices have -6-dB bandwidths up to 52% and minimum insertion losses ranging from -47 to -58 dB. Real-time images of phantom materials and ex vivo biological samples are shown.

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